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Polishing Machines

Hitachi Zosen provides optimum polishing systems in the field of FPDs and polishing process. We also offer optimum systems in the field of grinders in the FPD process. We manufacture machines that can handle growth in the size of glass substrates and we specialize in large polishing machines.

Major products

Large polishing machines (batch type)

For polishing photomasks and glass substrates, we design and manufacture machines suitable for applications such as lapping and polishing up to size G10.

Specialized large polishing machines (continuous type)

Our specialized large-sized grinding machines grind large substrates to make their surface flat. As the substrates are treated continuously, the machine can be built for use in a production line to increase production efficiency.

Polishing and cleaning systems

We offer grinding and cleaning systems for processes from substrate mounting through to substrate removal including cleaning and drying. We design and manufacture systems according to customer specifications.

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