[Abstract]

Hitachizosen has developed a laser patterning system for a variety of functional thin films. This system may replace the conventional wet etching process because it has fewer processes, a low running cost and creates low environmental pollution. The system enables high speed processing and high quality for large-scale panel used in liquid crystal displays production. This technology can apply other electrical products, such as plasma display, electronic paper, touch panel, semiconductor and so on. For these products, innovative proposals in which we make the best abilities for optoelectronics and mechatronics have been done.